Downloads: 123 | Views: 452 | Weekly Hits: ⮙1 | Monthly Hits: ⮙1

Research Paper | Mechanical Engineering | Morocco | Volume 9 Issue 12, December 2020 | Popularity: 6.7 / 10

Rate This Article!      

Numerical Simulation of a Microwave Argon PACVD Plasma Reactor at Low Pressure

Mohamed El Haim, Mohamed Atounti

Abstract: Discharge characteristics of argon microwave plasma were investigated by using fluid simulation of a MPACVD (Microwave Plasma Assisted Chemical Vapor Deposition) reactor based on finite elements method at low pressure (25-250) Pa. The microwave power was 2.45 GHz TM mode transmitted through the resonant cavity. Microwave power and pressure were considered simulation parameters and argon was used for working gas. A self-consistent fluid model was developed in Comsol Multiphysics Plasma Module for studying the discharge phenomena. The 2D plasma fluid model gives a complete description of spatial-and time evolution of the discharge characteristics such us: electron density and electron temperature. Simulation results show a strong effect of input parameters on the species densities distribution in the plasma.

Keywords: Finite element method, COMSOL MWP module, microwave plasma, plasma fluid model

Edition: Volume 9 Issue 12, December 2020

Pages: 16 - 19

Make Sure to Disable the Pop-Up Blocker of Web Browser

Click to Cite this Article

Similar Articles