Spray Pyrolysis-Based Fabrication and Characterization of Nanocrystalline BaTiO? Thin Films

Rajendrakumar Banshilal Ahirrao

Abstract: The present study reports the successful synthesis and comprehensive characterization of barium titanate (BaTiO₃) thin films prepared via the spray pyrolysis technique. High-purity BaTiO₃ films were deposited using a nitrate?alkoxide-based precursor chemistry, and their structural, compositional, and microstructural properties were systematically analyzed. X-ray diffraction (XRD) confirmed the formation of the polycrystalline perovskite BaTiO₃ phase, with major reflections consistent with standard diffraction data. The average crystallite size calculated via the Scherrer equation was ~32?41 nm, indicating nanocrystalline phase formation. Energy-dispersive X-ray analysis (EDAX) verified the presence of Ba, Ti, and O, with slight deviations from stoichiometry consistent with spray-derived oxide systems. Microstructural evaluation via FESEM revealed dense, uniformly packed grains with strong intergranular connectivity, while TEM and HRTEM confirmed nanoscale BaTiO₃ crystallites (10?20 nm) with well-defined lattice fringes corresponding to tetragonal perovskite planes. These structural and morphological features- including nano crystallinity, dense microstructure, and retention of perovskite symmetry- are known to enhance surface reactivity and charge-transport characteristics, establishing spray-pyrolyzed BaTiO₃ thin films as promising candidates for gas-sensing, dielectric, and electronic applications. The study provides important insights into precursor engineering, deposition conditions, and the structure?property relationships governing BaTiO₃ thin-film formation.

Keywords: BaTiO₃ thin films, spray pyrolysis, perovskite structure, XRD, FESEM, HRTEM, nanocrystalline oxides, gas-sensing materials, structural characterization

How to Cite?: Rajendrakumar Banshilal Ahirrao, "Spray Pyrolysis-Based Fabrication and Characterization of Nanocrystalline BaTiO? Thin Films", Volume 14 Issue 12, December 2025, International Journal of Science and Research (IJSR), Pages: 1480-1486, https://www.ijsr.net/getabstract.php?paperid=SR251218221350, DOI: https://dx.doi.org/10.21275/SR251218221350