International Journal of Science and Research (IJSR)

International Journal of Science and Research (IJSR)
Call for Papers | Fully Refereed | Open Access | Double Blind Peer Reviewed

ISSN: 2319-7064

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Development of RIE Processes for the Etching of Single Crystal Silicon, Silicon Dioxide

Rekha Chaudhary, Dhirender Kumar, Supriyo Das, B. D. Pant

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Last updated: 2026-10-05 15:49:40

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