Downloads: 123 | Weekly Hits: ⮙1 | Monthly Hits: ⮙1
Research Paper | Mechanical Engineering | Morocco | Volume 9 Issue 12, December 2020
Numerical Simulation of a Microwave Argon PACVD Plasma Reactor at Low Pressure
Mohamed El Haim | Mohamed Atounti
Abstract: Discharge characteristics of argon microwave plasma were investigated by using fluid simulation of a MPACVD (Microwave Plasma Assisted Chemical Vapor Deposition) reactor based on finite elements method at low pressure (25-250) Pa. The microwave power was 2.45 GHz TM mode transmitted through the resonant cavity. Microwave power and pressure were considered simulation parameters and argon was used for working gas. A self-consistent fluid model was developed in Comsol Multiphysics Plasma Module for studying the discharge phenomena. The 2D plasma fluid model gives a complete description of spatial-and time evolution of the discharge characteristics such us: electron density and electron temperature. Simulation results show a strong effect of input parameters on the species densities distribution in the plasma.
Keywords: Finite element method, COMSOL MWP module, microwave plasma, plasma fluid model
Edition: Volume 9 Issue 12, December 2020,
Pages: 16 - 19
Similar Articles with Keyword 'Finite element method'
Downloads: 0
Research Paper, Mechanical Engineering, India, Volume 11 Issue 6, June 2022
Pages: 681 - 685Optimization of Offshore Pipeline
Ujjwal Soni [2] | Prateek Yadav [2]
Downloads: 0
Research Paper, Mechanical Engineering, China, Volume 13 Issue 4, April 2024
Pages: 1173 - 1180An Elastoplastic Model Simulation to Investigate the Bending Load on Lattice Structures
Reza Shamim