A.A. Lebedev, A.V. Kirillov, L.P. Romanov, A.V. Zubov, A.M. Strelchuk
Abstract: The technology of microwave p-i-n diodes based on silicon carbide (SiC) has been developed. Using this diodes manufactured switches for 3-cm range. It is shown that the developed devices have an operating power of about 10 times the operating power of switches based on Si diodes with an equal base thickness of 5 microns. Outlined ways to further optimize the technology of these devices.
Keywords: SiC, P-i-N diodes, microwave