Downloads: 104 | Weekly Hits: ⮙1 | Monthly Hits: ⮙1
M.Tech / M.E / PhD Thesis | Electronics & Communication Engineering | India | Volume 5 Issue 3, March 2016
Design and Simulation of Novel MEMS based Capacitive Microphone
Lourembam Bandana, V. S. Selvakumar
Nowadays, MEMS (Micro-electromechanical Systems) technology is widely used to design various types of microphone. The capacitive microphone is highly preferable because of its high achievable, sensitivity, miniature size, batch fabrication, integration feasibility and long stability performance. In this paper, a novel MEMS capacitive microphone operating at a low actuating voltage is presented. It consists of Aluminum diaphragm arranged over the rigid Silicon back plate in which the diaphragm includes a number of holes to reduce the acoustical damping as well as stiffness. The design and simulation has been done using the three modules of Intellisuite- Intellimask, 3D builder and TEM (Thermo-electromechanical) analysis. Comparing the diaphragm of two different thicknesses, the thinner one gives higher deflection under the same applied pressure. The variation in the capacitance with the increase in pressure is analysed. The simulated result shows that the pull-in Voltage is 0.3V and the zero bias capacitance is 5.09 Pf. A process flow for the fabrication is designed and simulated using Intellifab.
Keywords: MEMS, microphone, TEM, Pull-In voltage, Intellifab
Edition: Volume 5 Issue 3, March 2016
Pages: 2076 - 2079
How to Cite this Article?
Lourembam Bandana, V. S. Selvakumar, "Design and Simulation of Novel MEMS based Capacitive Microphone", International Journal of Science and Research (IJSR), https://www.ijsr.net/search_index_results_paperid.php?id=NOV162401, Volume 5 Issue 3, March 2016, 2076 - 2079
Similar Articles with Keyword 'MEMS'
Traffic Light Control Using Accelerometer Sensor on ARM Platform
Chinnala Ramu, V. Neeharika
Role of Mecroelectromechanical Devices in Improving Human Health
Similar Articles with Keyword 'microphone'
Speech Signal Processing for Speaker Recognition
Yudhvir Singh Sidhu, Rupinder Kaur
Voice Characterization to Estimate the Closeness of the Unknown Voice with Reference Voice Using Spartan 6
Shivayogi G K, Mavyashree S
Similar Articles with Keyword 'TEM'
Realization of Smart City Using 5G Cognitive Radio
Lalit Chettri, Syed Sazad
A Study on Smart Parking Assistance
Faba Sosamma Abraham