International Journal of Science and Research (IJSR)

International Journal of Science and Research (IJSR)
Open Access | Fully Refereed | Peer Reviewed

ISSN: 2319-7064




Downloads: 104

M.Tech / M.E / PhD Thesis | Electronics & Communication Engineering | India | Volume 5 Issue 3, March 2016


Design and Simulation of Novel MEMS based Capacitive Microphone

Lourembam Bandana, V. S. Selvakumar


Abstract: Nowadays, MEMS (Micro-electromechanical Systems) technology is widely used to design various types of microphone. The capacitive microphone is highly preferable because of its high achievable, sensitivity, miniature size, batch fabrication, integration feasibility and long stability performance. In this paper, a novel MEMS capacitive microphone operating at a low actuating voltage is presented. It consists of Aluminum diaphragm arranged over the rigid Silicon back plate in which the diaphragm includes a number of holes to reduce the acoustical damping as well as stiffness. The design and simulation has been done using the three modules of Intellisuite- Intellimask, 3D builder and TEM (Thermo-electromechanical) analysis. Comparing the diaphragm of two different thicknesses, the thinner one gives higher deflection under the same applied pressure. The variation in the capacitance with the increase in pressure is analysed. The simulated result shows that the pull-in Voltage is 0.3V and the zero bias capacitance is 5.09 Pf. A process flow for the fabrication is designed and simulated using Intellifab.


Keywords: MEMS, microphone, TEM, Pull-In voltage, Intellifab


Edition: Volume 5 Issue 3, March 2016,


Pages: 2076 - 2079


How to Cite this Article?

Lourembam Bandana, V. S. Selvakumar, "Design and Simulation of Novel MEMS based Capacitive Microphone", International Journal of Science and Research (IJSR), https://www.ijsr.net/get_abstract.php?paper_id=NOV162401, Volume 5 Issue 3, March 2016, 2076 - 2079

How to Share this Article?

Enter Your Email Address


Similar Articles with Keyword 'MEMS'

Downloads: 110

M.Tech / M.E / PhD Thesis, Electronics & Communication Engineering, India, Volume 3 Issue 11, November 2014

Pages: 2972 - 2975

Traffic Light Control Using Accelerometer Sensor on ARM Platform

Chinnala Ramu, V. Neeharika

Share this Article

Downloads: 111

Review Papers, Electronics & Communication Engineering, India, Volume 4 Issue 2, February 2015

Pages: 2012 - 2016

Role of Mecroelectromechanical Devices in Improving Human Health

Ibrahim Abba

Share this Article

Similar Articles with Keyword 'microphone'

Downloads: 111

Review Papers, Electronics & Communication Engineering, India, Volume 3 Issue 8, August 2014

Pages: 1315 - 1316

Speech Signal Processing for Speaker Recognition

Yudhvir Singh Sidhu, Rupinder Kaur

Share this Article

Downloads: 117

Review Papers, Electronics & Communication Engineering, India, Volume 3 Issue 7, July 2014

Pages: 1464 - 1469

Voice Characterization to Estimate the Closeness of the Unknown Voice with Reference Voice Using Spartan 6

Shivayogi G K, Mavyashree S

Share this Article

Similar Articles with Keyword 'TEM'

Downloads: 190 | Weekly Hits: ⮙1 | Monthly Hits: ⮙1

Informative Article, Electronics & Communication Engineering, India, Volume 4 Issue 10, October 2015

Pages: 188 - 191

Realization of Smart City Using 5G Cognitive Radio

Lalit Chettri, Syed Sazad

Share this Article

Downloads: 152 | Weekly Hits: ⮙2 | Monthly Hits: ⮙2

Case Studies, Electronics & Communication Engineering, India, Volume 9 Issue 6, June 2020

Pages: 746 - 749

A Study on Smart Parking Assistance

Faba Sosamma Abraham

Share this Article
Top