Document de recherche | Mechanical Engineering | Maroc | Volume 9 Issue 12, December 2020
Numerical Simulation of a Microwave Argon PACVD Plasma Reactor at Low Pressure
Mohamed El Haim, Mohamed Atounti
Discharge characteristics of argon microwave plasma were investigated by using fluid simulation of a MPACVD (Microwave Plasma Assisted Chemical Vapor Deposition) reactor based on finite elements method at low pressure (25-250) Pa. The microwave power was 2.45 GHz TM mode transmitted through the resonant cavity. Microwave power and pressure were considered simulation parameters and argon was used for working gas. A self-consistent fluid model was developed in Comsol Multiphysics Plasma Module for studying the discharge phenomena. The 2D plasma fluid model gives a complete description of spatial-and time evolution of the discharge characteristics such us: electron density and electron temperature. Simulation results show a strong effect of input parameters on the species densities distribution in the plasma.
Keywords: Finite element method, COMSOL MWP module, microwave plasma, plasma fluid model
Edition: Volume 9 Issue 12, December 2020
Pages: 16 - 19
How to Cite this Article?
Mohamed El Haim, Mohamed Atounti, "Numerical Simulation of a Microwave Argon PACVD Plasma Reactor at Low Pressure", International Journal of Science and Research (IJSR), https://www.ijsr.net/search_index_results_paperid.php?id=ART20202595, Volume 9 Issue 12, December 2020, 16 - 19
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