International Journal of Science and Research (IJSR)

International Journal of Science and Research (IJSR)
Since Year 2012 | Open Access | Double Blind Reviewed

ISSN: 2319-7064




Downloads: 128

M.Tech / M.E / PhD Thesis | Electrical Engineering | India | Volume 3 Issue 3, March 2014


Design and Analysis of Temperature Sensor Array by Using Comsol Multiphysics 4.3

P. Mahalakshmi | S. Kalaiselvi [2]


Abstract: This paper propose a new design and analysis of MEMS sensor array based on thermal stress and electric current properties. The COMSOL Multiphysics 4.3 software is used to design the sensor array of the sensing layer. The material selection is done based on the thermal analysis of the sensor array. The polysilicon yield a maximum displacement of 0.00143m and also it is suitable for human skin. So polysilicon can be proposed for sensor array and then analysis the performance of sensor array.


Keywords: Tactile sensor, sensor array, Comsol Multiphysics, Semiconductor material, Minimal access surgery


Edition: Volume 3 Issue 3, March 2014,


Pages: 304 - 309


How to Cite this Article?

P. Mahalakshmi, S. Kalaiselvi, "Design and Analysis of Temperature Sensor Array by Using Comsol Multiphysics 4.3", International Journal of Science and Research (IJSR), Volume 3 Issue 3, March 2014, pp. 304-309, https://www.ijsr.net/get_abstract.php?paper_id=20131115

How to Share this Article?






Similar Articles with Keyword 'sensor'

Downloads: 7 | Weekly Hits: ⮙3 | Monthly Hits: ⮙4

Student Project, Electrical Engineering, India, Volume 10 Issue 6, June 2021

Pages: 475 - 476

PID Control of Heating Tank using PLC & SCADA

Brett Dsouza | Sanjana Magar | Sourabh Patil | Yogeshwar Thite

Share this Article

Downloads: 46

Research Paper, Electrical Engineering, Malaysia, Volume 2 Issue 9, September 2013

Pages: 1 - 4

Design an Automatic Temperature Control System for Smart Electric Fan Using PIC

Zairi Ismael Rizman [2] | Kim Ho Yeap | Nuraiza Ismail | Norizan Mohamad [2] | Nur Hafizah Rabi'ah Husin

Share this Article


Top