International Journal of Science and Research (IJSR)

International Journal of Science and Research (IJSR)
Since Year 2012 | Open Access | Double Blind Reviewed

ISSN: 2319-7064




Downloads: 118

Research Paper | Computer Science & Engineering | India | Volume 2 Issue 7, July 2013


Techniques Used for Mask Less Lithography

R. K. Singh | Rashmi Sharma [9]


Abstract: The ability to do selective lithography drives the semiconductor technology, but with the ever decreasing minimum feature size the need for higher resolution increases and so does the cost and complexity. Mask less lithography provides solution in the form of several techniques which are cost effective. In scanning electron beam lithography, instead of light, electron beam is used and the setup and principle used are similar to that of scanning electron microscope. Similarly scanning probe lithography is based on atomic force microscopy which employs cantilevered tips to modify the surface at an atomic scale. Both these techniques have low throughput and need to bring in some parallelism to improve the throughput. Zone-plate array lithography (ZPAL) uses diffracted light for patterning the surface. There are several other techniques as well. Though ZPAL has an increased speed, but all the techniques are being improved to achieve higher throughput rates.


Keywords: photo resist, numerical aperture, lithography


Edition: Volume 2 Issue 7, July 2013,


Pages: 135 - 138


How to Cite this Article?

R. K. Singh, Rashmi Sharma, "Techniques Used for Mask Less Lithography", International Journal of Science and Research (IJSR), Volume 2 Issue 7, July 2013, pp. 135-138, https://www.ijsr.net/get_abstract.php?paper_id=0201355

How to Share this Article?






Similar Articles with Keyword 'photo'

Downloads: 184 | Weekly Hits: ⮙1 | Monthly Hits: ⮙1

Research Paper, Computer Science & Engineering, Bangladesh, Volume 5 Issue 6, June 2016

Pages: 1523 - 1527

Multifunctional Remote Controlled Robot Using Android Application

T. A. Mithu | T. S. Reddy

Share this Article

Downloads: 0

Prototypes and Models, Computer Science & Engineering, India, Volume 11 Issue 8, August 2022

Pages: 1264 - 1269

Minimalistic Ray Tracing Engine for Experimentations

Benjamin Douglas J.

Share this Article


Top